Services

Repair service for Load Ports and process equipment

Hsinchu and Tainan service centers with a full stock of replacement parts — so an engineer reaches your fab in the shortest possible time.

Call +886-3-571-2233[email protected]
Service flow

Four steps from call to sign-off

AVG. RESPONSE — HSINCHU / TAINAN
  1. 01
    ReportCall +886-3-571-2233 or email [email protected] with the model (e.g. TAS300 E4) and symptoms; we confirm which parts to bring.
  2. 02
    On siteAn engineer leaves from the nearer of our Hsinchu or Tainan centers with stocked parts and reaches your fab as fast as possible.
  3. 03
    ReplaceOn-site diagnosis, replacement of the faulty module or part, and adjustment; items that need bench work go back to our service room.
  4. 04
    Sign-offWe verify motion and signals together with your equipment engineer, then sign off.
Scope

What we service

  1. 01TDK Load Port repair & salesTroubleshooting, module and part replacement, and unit sales — parts stocked in Hsinchu and Tainan.FOR TAS300 E4 / E4A / J1 / RT, TAS450 A3
  2. 02Heater & upper/lower electrode repairRepair of heaters and upper/lower electrodes for semiconductor equipment.FOR Semiconductor process equipment
  3. 03CMP retainer ringsRetainer rings for CMP processes.FOR CMP polishing tools
  4. 04TFT-LCD equipment partsSpare parts for TFT-LCD equipment.FOR TFT-LCD panel process equipment
  5. 05Vacuum valve repairInspection, repair and maintenance of vacuum valves.FOR Vacuum process equipment
Service centers

Two service centers in Taiwan

Hsinchu (HQ)+886-3-571-223314F-2, No. 295, Sec. 2, Guangfu Rd., Hsinchu City, TaiwanOpen in Google Maps ↗
Tainan+886-6-599-8738No. 10, Ln. 2, Minsheng Rd., Xinshi Dist., Tainan City, TaiwanOpen in Google Maps ↗

In China, partner offices in Shanghai and Beijing provide local support. Partner contacts →

Talk to us now

Load Port down? Call us.

03-571-2233
03-571-2233CallEmail